Piezo Transducer / Piezoelectric Actuator, PZT Translator: Industrial & Research Applications
1998 PI Piezo Nanopositioning Catalog
P_286, P_288, P_289 High Voltage PZT Disk Transducers / Actuators
o Stroke to 200 microns
o Sub-nm Precision
o Flat Design
o Low Cost
Disk Piezo Transducers / Actuators belong to the group of bimorph piezo actuators (see "Tutorial: Piezoelectrics & Piezoelectric Actuation for Nanopositioning" section for description of design principle). P_286 to P_289 Transducers / Actuators are high resolution actuators for static and dynamic applications providing fast response and sub-nanometer resolution.
Compared to stack Transducers / Actuators, they provide for a relatively large travel range (up to 200 µm) in an extremely small package. P_286 can be attached to a flat surface with the outer ring. The Piezoelectric Transducer / Actuator expands via the central tapped connector. P_288 and P_289 are double disk constructions where the expansion occurs between the two facing tapped connectors.
Applications: Dynamic and static precision positioning, pneumatic valves, patch clamping, etc. ().
Ordering Information:
P_286.20: Disk Piezoelectric Transducer / Actuator, 100 µm, 300 mm Teflon Leads
P_286.23: Disk Piezoelectric Transducer / Actuator, 100 µm, w/o Top Piece and Silicone Insulation, 300 mm Teflon Leads
P_286.40: Disk Piezoelectric Transducer / Actuator, 100 µm, 1 m Coaxial Cable, LEMO Connector
P_288.00: Mini Disk Piezoelectric Transducer / Actuator, 50 µm, 300 mm Teflon Leads
P_289.20: Double Disk Piezoelectric Transducer / Actuator, 200 µm, 300 mm Teflon Leads
P_289.40: Double Disk Piezoelectric Transducer / Actuator, 200 µm, 1 m Coaxial Cable, LEMO Connector
Options & Upgrades: 1)
P_705.00 Option: Positive Piezo Polarity (see page 45)
Accessories:
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Customer specific piezo designs available!
Specifications: P_286.xx, 289.xx, 288.00
Models P_286.xx P_288.00 P_289.xx Units Notes see p. 47
Open-loop displacement@ 0 to - 750 V (P_288), 0 to 1000 V (P_286, P_289) 100 50 200 µm ± 20 % A4
* Open loop resolution 0.2 0.1 0.4 nm C2
Stiffness 0.3 0.2 0.15 N/µm ± 20 % D1
Blocking force generation 30 10 30 N ± 20 % D2
Pushing / Tensile force capacity 20 / 10 10 / 5 20 / 10 N D3
Max. torque at tip 3 mNm D6
Maximum drive voltage -1000 -750 -1000 V A7
Electrical capacitance 35 9 70 nF ± 20 % F1
Dynamic operating current coefficient (DOCC) 0.5 0.25 0.5 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 2.5 2 1.1 kHz ± 20 % G2
Operating temperature -40 to +80 ?C H2
Voltage connector s. ordering information J1
Weight 42 8 56 g ± 5 % K
Material case / end pieces N-S brass N-S L
Recommended Piezo Linear Amplifier / Controller B, I M
* Noise with E507 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
P_249 Miniature Open Loop High Voltage PZT Piezoelectric Transducer / Actuator
o Stroke to 10 microns
o Submillisecond Responsivness
o Sub-nm Precision
o Optional UHV, High & Low Temperature
P_249 Miniature PZT Transducers / Actuators are ultra-precision linear actuator pushers for static and dynamic applications. They provide subnanometer resolution with submillisecond response.
Due to their high resonant frequency, the Transducers / Actuators are ideal for dynamic operation of very light parts. For dynamic operation with larger loads an external preload is recommended. PI offers a variety of preloaded Transducers / Actuators for applications with larger tensile forces (see following pages).
Care must be taken during mounting (e.g. by epoxy) and operation because the Transducers / Actuators are not protected by a case and preload (see mounting guidelines on page ).
Applications: Laser tuning, Dynamic and static precision positioning of small parts, fiber aligning, etc. ().
Options & Upgrades: 1)
P_702.10 High Temperature Upgrade (see page 45)
P_702.20 Low-Temperature Upgrade (see page 45)
P_703.10 High Vacuum Option (see page 45)
P_705.00 Option: Positive Piezo Polarity (see page 45)
Accessories:
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_249
Models P_249.10 P_249.20 Units Notes
see p. 47
Open-loop displacement@ 0 to -1000 V 5 10 µm ± 20 % A4
* Open loop resolution < 0.05 0.1 nm C2
Stiffness 20 10 N/µm ± 20 % D1
Blocking force generation 100 100 N ± 20 % D2
Pushing / Tensile force capacity 150 / 3 150 / 3 N D3
Maximum drive voltage range 0 to -1000 V A7
Electrical capacitance 6 12 nF ± 20 % F1
Dynamic operating current coefficient (DOCC) 1.5 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 35 18 kHz ± 20 % G2
Operating temperature -40 to +80 ?C H2
Voltage connector PT J1
Weight 2.5 3 g ± 5 % K
Recommended Amplifier B, I M
* Noise with E507 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available!
P_802.00, P_802.10, P_804.10 Open Loop Low Voltage PZT Stack Piezoelectric Transducer / Actuator
o Stroke to 15 microns
o Push Forces to 3000 N
o Submillisecond Responsivness
o Sub-nm Precision
P_802 and P_804 Piezoelectric Transducer Actuators are ultra-precision linear actuator pushers for static and dynamic applications. They provide subnanometer resolution with submillisecond response.
The Transducers / Actuators consist of a high reliability multilayer PZT ceramics block operating in a voltage range of 0 to 100V. The stack is covered by epoxy insulation and heat shrinking tube for protection and strain relief of the wire leads.
Due to their high resonant frequency, they are ideal for dynamic operation with small loads. For dynamic operation with larger loads an external preload is recommended. PI offers a variety of preloaded Transducers / Actuators for applications with larger tensile forces (see following pages).
Care must be taken during mounting (e.g. by epoxy) and operation because the Transducers / Actuators are not protected by a case and preload (see mounting guidelines on page ).
Applications: Dynamic and static precision positioning, fiber aligning, laser tuning, patch clamping, etc. ().
Accessories:
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_802, P_804
Models P_802.00 P_802.10 P_804.10 Units Notes
see p. 47
Open-loop displacement@ 0 to 100 V 6 15 15 µm ± 20 % A2
* Open loop resolution 0.06 0.15 0.15 nm C1
Stiffness 200 100 400 N/µm ± 20 % D1
Blocking force generation 1200 1500 6000 N ± 20 % D2
Pushing / Tensile force capacity 1000 / 3 1000 / 5 3000 / 20 N D3
Electrical capacitance 0.9 1.8 7.2 µF ± 20 % F1
Dynamic operating current coefficient (DOCC) 15 15 60 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 55 29 29 kHz ± 20 % G2
Operating temperature -20 to +80 ?C H2
Voltage connector PT J1
Weight 3 6 24 g ± 5 % K
Dimensions 6 x 6 x 9 6 x 6 x 18 11 x 11 x 18 mm ± 0.5
Recommended Amplifier A, C, H M
* Noise with E503 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available!
P_250 Micrometer Mountable Open Loop High Voltage PZT Stack Piezoelectric Transducer / Actuator
o Stroke 20 microns
o Mounts Inside Micrometer Tip
o Submillisecond Responsivness
o Sub-nm Precision
o Optional Positive Polarity Option
P_250 PZT Piezoelectric Transducer Actuators are ultra-precision linear actuator pushers specially designed for integration in the tips of the M-222 to M-226 DC-Mike motorized actuators, the M-168 Stepper Mike actuators and the M-631 to M-633 manual micrometers (see "Micropositioners" section). They provide subnanometer resolution with submillisecond response.
Applications: Laser tuning, Dynamic and static precision positioning of small parts, fiber aligning, etc. ().
Options & Upgrades: 1)
P_705.00 Option: Positive Piezo Polarity (see page 45)
Accessories:
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_250
Models P_250.20 Units Notes
see p. 47
Open-loop displacement@ 0 to -1000 V 20 µm ± 20 % A4
* Open loop resolution 0.2 nm C2
Stiffness 5.5 N/µm ± 20 % D1
Blocking force generation 110 N ± 20 % D2
Pushing / Tensile force capacity 100 / 5 N D3
Maximum drive voltage range -1000 V A7
Electrical capacitance 22 nF ± 20 % F1
Dynamic operating current coefficient (DOCC) 1.4 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 11 kHz ± 20 % G2
Operating temperature -40 to +80 ?C H2
** Voltage connector VH J1
Weight 28 g ± 5 % K
Recommended Amplifier B, I M
** Model P_250.10 with BNC connector
* Noise with E507 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available!
P_810 Small Load Open Loop Low Voltage PZT Piezoelectric Transducer / Actuator
o Stroke to 45 microns
o Low Capacitance
o Submillisecond Responsivness
o Sub-nm Precision
P_810 Small Load Piezoelectric Transducer Actuators are ultra-precision linear actuator pushers for static and dynamic applications with low forces. They provide subnanometer resolution with submillisecond response.
The PZT Transducers / Actuators are equipped with high reliability multilayer Piezoelectric ceramic stacks protected by a non magnetic stainless steel case. Because of the small dimensions, no preload is integrated. P_810 Transducers / Actuators are sensitive to tensile, bending and lateral forces (see mounting guidelines on page ).
Attachment is via the ferromagnetic end surfaces e.g. by epoxy, or via magnets (no clamping at the steel case). PI offers a variety of preloaded Transducers / Actuators for applications with larger tensile forces (see following pages).
Applications: Dynamic and static precision positioning (low forces) of small parts, fiber aligning, laser tuning, etc. ().
Accessories:
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_810
Models P_810.10 P_810.20 P_810.30 Units Notes
see p. 47
Open-loop displacement@ 0 to 100 V 15 30 45 µm ± 20 % A2
* Open loop resolution 0.15 0.3 0.45 nm C1
Stiffness 12 7 4 N/µm ± 20 % D1
Blocking force generation 180 N ± 20 % D2
Pushing / Tensile force capacity 50 / 1 N D3
Max. torque at tip 80 mNm D6
Electrical capacitance 0.45 0.9 1.35 µF ± 20 % F1
Dynamic operating current coefficient (DOCC) 3.75 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 22 15 12 kHz ± 20 % G2
Operating temperature -20 to +80 ?C H2
Voltage connector PTFE, 100 mm ?5 J1
Weight 4 6 8 g ± 5 % K
Material case / end pieces N-S / S L
Length L 20 38 56 mm ± 0.3
Recommended Amplifier A, C, G M
* Noise with E503 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available!
P_830 Open Loop Low Voltage Piezo Stack Actuator
o Stroke to 60 microns
o Push Forces to 1000 N
o Pull Forces to 20 N
o Submillisecond Responsivness
o Sub-nm Precision
P_830 Piezoelectric Transducer Actuators are ultra-precision linear actuator pushers for static and dynamic applications. They provide subnanometer resolution with submillisecond response.
The PZT Transducers / Actuators are equipped with high reliability multilayer Piezoelectric ceramic stacks protected by a non magnetic stainless steel case. Because of the small dimensions, no preload is integrated. P_830 Transducers / Actuators are sensitive to tensile, bending and lateral forces (see mounting guidelines on page ).
Attachment is via the ferromagnetic end surfaces e.g. by epoxy, or via magnets (no clamping at the steel case). PI offers a variety of preloaded Transducers / Actuators for applications with larger tensile forces (see following pages).
Applications: Dynamic and static precision positioning, fiber aligning, laser tuning, patch clamping, etc. ().
Accessories:
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_830
Models P_830.10 P_830.20 P_830.30 P_830.40 Units Notes
see p. 47
Open-loop displacement@ 0 to 100 V 15 30 45 60 µm ± 20 % A2
* Open loop resolution 0.15 0.3 0.45 0.6 nm C1
Stiffness 100 50 33 25 N/µm ± 20 % D1
Blocking force generation 1500 N ± 20 % D2
Pushing / Tensile force capacity 1000 / 5 N D3
Max. torque at tip 200 mNm D6
Electrical capacitance 1.8 3.6 5.4 7.2 µF ± 20 % F1
Dynamic operating current coefficient (DOCC) 15 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 23 14 10 8.5 kHz ± 20 % G2
Operating temperature -20 to +80 ?C H2
Voltage connector PTFE, 100 mm ?5 J1
Weight 10 16 21 27 g ± 5 % K
Material case / end pieces N-S / S L
Length L 22 40 58 76 mm ± 0.3
Recommended Amplifier A, C, G M
* Noise with E503 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available!
P_820 Small Load Open Loop Low Voltage PZT Stack Piezoelectric Transducer / Actuator
o Stroke to 45 microns
o Push Forces to 50 N
o Pull Forces to 10 N
o Submillisecond Responsivness
o Sub-nm Precision
o Optional Ball Tip
P_820 Small Load Piezoelectric Actuators are ultra-precision linear actuator pushers for static and low dynamic applications. They provide subnanometer resolution with submillisecond response.
The PZT Transducers / Actuators are equipped with high reliability multilayer Piezoelectric ceramic stacks protected by an internally spring Pre-Loaded non magnetic stainless steel case. The standard Piezoelectric Transducer / Actuator tip is a stainless steel flat.
Due to the small dimensions of the Piezoelectric ceramics P_820 Transducers / Actuators are sensitive to bending and lateral forces. Select the P_820.95 ball-tiP_option to help decouple off-axis or torque loads from the Piezoelectric Transducer / Actuator tip. For push/pull forces up to 3 N, the piezo Piezoelectric Transducer / Actuator can be mounted by clamping around the case. For larger forces, the Piezoelectric Transducer / Actuator must be mounted by the base. For positioning of magnetic parts the P_176.30 Magnetic Adapter can be glued onto the Piezoelectric Transducer / Actuator tip
Applications: Static and low dynamic positioning of small parts, fiber aligning, laser tuning, etc. ().
Options & Upgrades:
P_820.95 Ball Tip (see page 45)
Accessories:
P_176.30 Magnetic Adapter, see page 45
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_820
Models P_820.10 P_820.20 P_820.30 Units Notes
see p. 47
Open-loop displacement@ 0 to 100 V 15 30 45 µm ± 20 % A2
* Open loop resolution 0.15 0.3 0.45 nm C1
Stiffness 13 7 4 N/µm ± 20 % D1
Blocking force generation 180 N ± 20 % D2
Pushing / Tensile force capacity 50 / 10 N D3
Max. torque at tip 80 mNm D6
Electrical capacitance 0.45 0.9 1.35 µF ± 20 % F1
Dynamic operating current coefficient (DOCC) 3.75 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 22 15 12 kHz ± 20 % G2
Operating temperature -20 to +80 ?C H2
Voltage connector VL J1
Weight 8 11 14 g ± 5 % K
Material case / end pieces N-S L
Length L 26 44 62 mm ± 0.3
Recommended Piezo Linear Amplifier / Controller A, C, G M
* Noise with E503 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available!
P_840, P_841 Pre-Loaded Closed-Loop / Open-Loop Low Voltage PZT Piezoelectric Transducer / Actuator
o Stroke to 90 microns
o Push Forces to 1000 N
o Pull Forces to 100 N
o Submillisecond Responsivness
o Sub-nm Precision
o Optional Ball Tip, UHV
P_840 and P_841 Preloaded Piezoelectric Actuators are ultra-precision linear actuator pushers for static and dynamic applications. They provide subnanometer resolution with submillisecond response. The internal spring preload makes them ideal for dynamic applications.
The P_840 is specifically designed for open loop operation. For optimum repeatability and precision, the P_841 closed loop version integrates ultrahigh-resolution strain gage displacement sensors for operation with PI piezo servo controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages , for details).
The PZT Transducers / Actuators are equipped with high reliability multilayer Piezoelectric ceramic stacks protected by an internally spring Pre-Loaded non magnetic stainless steel case. The standard Piezoelectric Transducer / Actuator tip and base have tapped holes. Select the P_840.95 ball-tiP_option to help decouple off-axis or torque loads from the Piezoelectric Transducer / Actuator tip.
For push/pull forces up to 5 N, the piezo Piezoelectric Transducer / Actuator can be mounted by clamping around the case. For larger forces, the Piezoelectric Transducer / Actuator must be mounted by the base. For positioning of magnetic parts the P_176.20 Magnetic Adapter can be screwed into the Piezoelectric Transducer / Actuator tip.
Applications: Dynamic and static precision positioning, disk drive testing, smart structures, adaptive mechanics, vibration cancellation, switching, laser tuning, patch clamping, etc. ().
Fig. P841resol Response of a P_841.10 to a 3 nm peak-to-peak square wave control input signal, measured with servo control bandwidth set to 240 Hz and 2 msec settling time. Note the crisp response to the square wave control signal.
Options & Upgrades:
P_703.20 High Vacuum Option (see page 45)
P_840.95 Ball Tip (see page 45)
Accessories:
P_176.20 Magnetic Adapter with M3 Threaded Stud, see page 45
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_840, P_841
Models (Open Loop Versions)
(Closed Loop Versions *) P_840.10
P_841.10 P_840.20
P_841.20 P_840.30
P_841.30 P_840.40
P_841.40 P_840.60
P_841.60 Units Notes see p. 47
Open-loop displacement@ 0 to 100 V 15 30 45 60 90 µm ± 20 % A2
Closed-loop displacement? 15 30 45 60 90 µm A5
* Integrated high-resolution position sensor SGS B
Closed / open loop ** resolution 0.3 / 0.15 0.6 / 0.3 0.9 / 0.45 1.2 / 0.6 1.8 / 0.9 nm C3
Stiffness 100 50 33 25 16 N/µm ± 20 % D1
Blocking force generation 1500 N ± 20 % D2
Pushing / Tensile force capacity 1000 / 100 N D3
Max. torque at tip 350 mNm D6
Electrical capacitance 1.8 3.6 5.4 7.2 10.8 µF ± 20 % F1
Dynamic operating current coefficient (DOCC) 15 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 18 14 10 8.5 6 kHz ± 20 % G2
Operating temperature -20 to +80 ?C H2
Voltage connector VL J1
* Sensor connector L J2
Weight without cables 20 28 46 54 62 g ± 5 % K
Material case / end pieces N-S L
Length L 32 50 68 86 122 mm ± 0.3
Recommended Piezo Linear Amplifier / Controller C, D ,G , H M
* Closed loop models only. Closed loop models are supplied with calibration data sheets
** Noise with E503 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available
P_842, P_843 Pre-Loaded Closed-Loop / Open-Loop Low Voltage PZT Stack Actautor
o Stroke to 90 microns
o Push Forces to 800 N
o Pull Forces to 300 N
o Submillisecond Responsivness
o Sub-nm Precision
o UHV Option
P_842 and P_843 Preloaded Piezoelectric Actuators are ultra-precision linear actuator pushers for static and dynamic applications. They provide subnanometer resolution with submillisecond response. The internal spring preload of 300 N makes them ideal for machining applications.
P_842 is specifically designed for open loop operation. For optimum repeatability and precision, the P_843 closed loop version integrates ultrahigh-resolution strain gage displacement sensors for operation with PI piezo servo controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages , for details).
The PZT Transducers / Actuators are equipped with high reliability multilayer Piezoelectric ceramic stacks protected by an internally spring Pre-Loaded non magnetic stainless steel case. For push/pull forces up to 100 N, the piezo Piezoelectric Transducer / Actuator can be mounted by clamping around the case. For larger forces, the Piezoelectric Transducer / Actuator must be mounted by the base. The P_176.50 Flexible Tip is available to protect the ceramics from bending forces (see page 46).
Applications: Dynamic and static precision positioning, disk drive testing, optics, metrology, smart structures, precision machining, tool servo, adaptive mechanics, vibration cancellation, switching, laser tuning, patch clamping, etc. ().
Options & Upgrades:
P_703.20 High Vacuum Option (see page 45)
Accessories:
P_176.50 Flexible Tip, see page 46
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_842, P_843
Models (Open Loop Versions)
(Closed Loop Versions *) P_842.10
P_843.10 P_842.20
P_843.20 P_842.30
P_843.30 P_842.40
P_843.40 P_842.60
P_843.60 Units Notes see p. 47
Open-loop displacement@ 0 to 100 V 15 30 45 60 90 µm ± 20 % A2
Closed-loop displacement? 15 30 45 60 90 µm A5
* Integrated feedback sensor SGS B
Closed / open loop ** resolution 0.3 / 0.15 0.6 / 0.3 0.9 / 0.45 1.2 / 0.6 1.8 / 0.9 nm C3
Stiffness 100 50 33 25 16 N/µm ± 20 % D1
Blocking force generation 1500 N ± 20 % D2
Pushing / Tensile force capacity 800 / 300 N D3
Max. torque at tip 350 mNm D6
Electrical capacitance 1.8 3.6 5.4 7.2 10.8 µF ± 20 % F1
Dynamic operating current coefficient (DOCC) 15 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 18 14 10 8.5 6 kHz ± 20 % G2
Operating temperature -20 to +80 ?C H2
Voltage connection VL J1
* Sensor connector L J2
Weight without cables 31 42 53 64 86 g ± 5 % K
Material case / end pieces N-S L
Length L 37 55 73 91 127 mm ± 0.3
Recommended Piezo Linear Amplifier / Controller C, D ,G , H M
* Closed loop models only. Closed loop models are supplied with calibration data sheets
** Noise with E503 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available!
P_844, P_845 Pre-Loaded Closed-Loop / Open-Loop Low Voltage PZT Piezoelectric Transducer / Actuator
o Stroke to 90 microns
o Push Forces to 3000 N
o Pull Forces to 700 N
o Submillisecond Responsivness
o Sub-nm Precision
o Optional UHV, Water Protected
P_844 and P_845 Preloaded Piezoelectric Actuators are ultra-precision linear actuator pushers for static and dynamic applications. They provide subnanometer resolution with submillisecond response. The internal spring preload makes them also ideal for push/pull applications such as precision tools servos and machining applications.
P_844 is specifically designed for open loop operation. For optimum repeatability and precision, the P_845 closed loop version integrates ultrahigh-resolution strain gage displacement sensors for operation with PI piezo servo controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages , for details).
The PZT Transducers / Actuators are equipped with high reliability multilayer Piezoelectric ceramic stacks protected by an internally spring Pre-Loaded non magnetic stainless steel case. For push/pull forces up to 100 N, the piezo Piezoelectric Transducer / Actuator can be mounted by clamping around the case. For larger forces, the Piezoelectric Transducer / Actuator must be mounted by the base. The P_176.60 Flexible Tip is available to protect the ceramics from bending forces (see page 46).
Applications: Dynamic and static precision positioning, disk drive testing, optics, metrology, smart structures, precision machining, tool servo, adaptive mechanics, vibration cancellation, switching, laser tuning, etc. ().
Options & Upgrades:
P_703.20 High Vacuum Option (see page 45)
P_706.xx Water Protected Case (see page 45)
Accessories:
P_176.60 Flexible Tip, see page 46
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_844, P_845
Models (Open Loop Versions)
(Closed Loop Versions *) P_844.10
P_845.10 P_844.20
P_845.20 P_844.30
P_845.30 P_844.40
P_845.40 P_844.60
P_845.60 Units Notes see p. 47
Open-loop displacement@ 0 to 100 V 15 30 45 60 90 µm ± 20 % A2
Closed-loop displacement? 15 30 45 60 90 µm A5
* Integrated feedback sensor SGS B
Closed / open loop ** resolution 0.3 / 0.15 0.6 / 0.3 0.9 / 0.45 1.2 / 0.6 1.8 / 0.9 nm C3
Stiffness 400 200 133 100 65 N/µm ± 20 % D1
Blocking force generation 6000 N ± 20 % D2
Pushing / Tensile force capacity 3000 / 700 N D3
Max. torque at tip 1000 mNm D6
Electrical capacitance 7.2 14.5 22 29 43 µF ± 20 % F1
Dynamic operating current coefficient (DOCC) 60 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 16 12 9 7.5 5.5 kHz ± 20 % G2
Operating temperature -20 to +80 ?C H2
Voltage connection VL J1
* Sensor connector L J2
Weight without cables 84 108 132 156 204 g ± 5 % K
Material case / end pieces N-S L
Length L 47 65 83 101 137 mm ± 0.3
Recommended Piezo Linear Amplifier / Controller C, D ,G , H M
* Closed loop models only. Closed loop models are supplied with calibration data sheets
** Noise with E503 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available!
P_170 ..., P_178 Closed-Loop / Open-Loop High Voltage PZT Piezoelectric Transducer / Actuator
o Stroke to 80 microns
o Push Forces to 2000 N
o Pull Forces to 50 N
o Submillisecond Responsivness
o Sub-nm Precision
o Optional UHV, High & Low Temperature, Choice of End Pieces
P_170 to 173 and P_178 Piezoelectric Transducers / Actuators are ultra-precision linear actuator pushers for static and dynamic applications. They provide subnanometer resolution with submillisecond response.
The standard piezo translator models are designed for open-loop operation. For optimum repeatability and precision, select the P_177.10 high-accuracy closed-loop upgrade integrating ultrahigh-resolution strain gage displacement sensors for operation with PI piezo servo controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages , for details).
P_178 models are constructed of a larger number of thinner Piezoelectric ceramic layers than P_170 to P_173 models, providing more displacement in the same package. On the other hand, they handle lower push/pull forces and the maximum operating voltage is limited to -1000 V. Also, voltages in excess of -750 V are recommended only for short periods of time for the P_178 models.
The PZT ceramic stack is protected by an aluminum case. Standard top piece is a magnet, standard bottom piece is a ferromagnetic steel flat. A variety of optional top and bottom pieces are available for ease of mounting. For push/pull forces up to 3 N, the piezo Piezoelectric Transducer / Actuator can be mounted by clamping around the case. For larger forces, the Piezoelectric Transducer / Actuator must be mounted by the base.
Applications: Dynamic and static precision positioning, optics, metrology, laser tuning, patch clamping, etc. ().
Options & Upgrades: 1)
P_177.10 High-Precision Closed-Loop Upgrade, (Strain Gauge Displacment Sensor) 44), not for P_170.00, P_178.10
P_702.20 Low-Temperature Upgrade (see page 45)
P_703.10 High Vacuum Option (see page 45)
P_705.00 Option: Positive Piezo Polarity (see page 45)
P_700.10 M4 on Top Piece
P_700.01 M4 on Bottom Piece
P_700.20 M5 on Top Piece
P_700.02 M5 on Bottom Piece
P_700.03 M8 on Bottom Piece
P_700.40 4/40 on Top Piece
P_700.04 4/40 on Bottom Piece
P_700.50 Flat Top Piece, Tungsten Carbide
P_700.60 Flat Top Piece, Tungsten Carbide Polished
P_700.70 Ball Tip (see page 45)
Accessories:
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_170 to P_178.50
Piezoelectric Transducer Model * P_170.00 P_171.00 P_172.00 P_173.00 P_178.10 P_178.20 P_178.30 P_178.50 Units Notes see p. 47
Open-loop displacement@ 0 to -1000 V 5 10 20 40 10 20 40 80 µm ± 20 % A4
Closed-loop displacement? * 5 10 20 40 10 20 40 80 µm A5
* Integrated high-resolution position sensor - SGS SGS SGS - SGS SGS SGS B
* Closed / open loop ** resolution 0.1 / 0.05 0.2 / 0.1 0.4 / 0.2 0.8 / 0.4 0.2 / 0.1 0.4 / 0.2 0.8 / 0.4 1.6 / 0.8 nm C4
Stiffness 310 180 98 53 310 170 91 48 N/µm ± 20 % D1
Blocking force generation 1500 1500 1500 1500 2400 2400 2400 2400 N ± 20 % D2
Pushing / Tensile force capacity 2000 / 50 N D3
Max. torque at tip 500 mNm D6
Maximum drive voltage -1500 -1500 -1500 -1500 -1000 -1000 -1000 -1000 V A7
Electrical capacitance 14 25 47 89 50 95 180 340 nF ± 20 % F1
Dynamic operating current coefficient (DOCC) 3.25 3.25 3.25 3.25 6 6 6 6 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 17 14 9 6 17 14 9 6 kHz ± 20 % G2
Operating temperature -40 to +80 ?C H2
Voltage connector VH J1
* Sensor connector - L L L - L L L J2
Weight without cables 19 26 40 65 19 26 40 65 g ± 5 % K
Material case / end pieces Al / S L
Length of case w/o end pieces 14 22 38 68 14 22 38 68 mm ± 0.5
Recommended Piezo Linear Amplifier / Controller B, I, J M
* Closed-loop piezo actuator models require the P_177.10 strain gauge position sensor option and are supplied with calibration data sheets
** Noise with E507 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available!
P_244, P_245 Pre-Loaded Closed-Loop / Open-Loop High Voltage PZT Piezoelectric Transducer / Actuator
o Stroke to 120 microns
o Push Forces to 2000 N
o Pull Forces to 300 N
o Submillisecond Responsivness
o Sub-nm Precision
o Optional UHV, Low & High Temperature
P_244 and P_245 Preloaded Piezoelectric Actuators are ultra-precision linear actuator pushers for static and dynamic applications. They provide subnanometer resolution with submillisecond response. The internal spring preload makes them also ideal for push/pull applications such as precision tools servos and machining applications.
The standard piezo translator models are designed for open-loop operation. For optimum repeatability and precision, select the P_177.10 high-accuracy closed-loop upgrade integrating ultrahigh-resolution strain gage displacement sensors for operation with PI piezo servo controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages , for details).
P_245 models are constructed of a larger number of thinner Piezoelectric ceramic layers, providing up to twice the displacement of the P_244 models in the same package.
The PZT ceramic stack is protected by an internally spring preload stainless steel case. The standard Piezoelectric Transducer / Actuator tip and base have tapped holes. Select the P_244.95 ball-tiP_option to help decouple off-axis or torque loads from the Piezoelectric Transducer / Actuator tip. For push/pull forces up to 5 N, the piezo Piezoelectric Transducer / Actuator can be mounted by clamping around the case. For larger forces, the Piezoelectric Transducer / Actuator must be mounted by the base.
For positioning of magnetic parts the P_176.10 Magnetic Adapter can be screwed into the Piezoelectric Transducer / Actuator tip
Applications: Dynamic and static precision positioning, optics, metrology, smart structures, precision machining, tool servo, adaptive mechanics, vibration cancellation, switching, laser tuning, patch clamping, etc. ().
Options & Upgrades: 1)
P_177.10 High-Precision Closed-Loop Upgrade, (Strain Gauge Displacment Sensor) 44)
P_702.10 High Temperature Upgrade (see page 45)
P_702.20 Low-Temperature Upgrade (see page 45)
P_703.20 High Vacuum Option (see page 45)
P_705.00 Option: Positive Piezo Polarity (see page 45)
P_244.95 Ball Tip (see page 45)
Accessories:
P_176.10 magnetic adapter with M5 threaded stud, see page 45
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_244, P_245
Piezoelectric Transducer Model *
P_244.10 P_244.20 P_244.30 P_244.40 P_245.20 P_245.30 P_245.50 P_245.70 Units Notes see p. 47
Open-loop displacement@ 0 to -1000 V * 10 20 40 60 20 40 80 120 µm ± 20 % A4
* Closed-loop displacement? 10 20 40 60 20 40 80 120 µm A5
* Integrated high-resolution position sensor SGS B
* Closed / open loop ** resolution 0.2 / 0.1 0.4 / 0.2 0.8 / 0.4 1.2 / 0.6 0.4 / 0.2 0.8 / 0.4 1.6 / 0.8 2.4 / 1.2 nm C4
Stiffness 180 98 53 29 170 91 48 32 N/µm ± 20 % D1
Blocking force generation 1800 2000 2000 2000 3000 3000 3000 3000 N ± 20 % D2
Pushing / Tensile force capacity 2000 / 300 N D3
Max. torque at tip 50 mNm D6
Maximum drive voltage -1500 -1500 -1500 -1500 -1000 -1000 -1000 -1000 V A7
Electrical capacitance 25 47 89 133 95 180 340 500 nF ± 20 % F1
Dynamic operating current coefficient (DOCC) 3 3 3 3 6 6 6 6 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 16 12 9 5.5 15 11 8 5 kHz ± 20 % G2
Operating temperature -40 to +80 ?C H2
Voltage connector VH J1
* Sensor connector L J2
Weight without cables 59 72 102 136 59 72 102 136 g ± 5 % K
Material case / end pieces N-S L
Length L 45 61.5 93.5 127 45 61.5 93.5 127 mm ± 0.5
Recommended Piezo Linear Amplifier / Controller B, I, J M
* Closed-loop piezo actuator models require the P_177.10 strain gauge position sensor option and are supplied with calibration data sheets
** Noise with E507 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available!
P_239 Pre-Loaded Closed-Loop / Open-Loop High Voltage PZT Piezoelectric Transducer / Actuator
o Stroke to 180 microns
o Push Forces to 4500 N
o Pull Forces to 500 N
o Submillisecond Responsivness
o Sub-nm Precision
o Optional UHV, Low & High Temperature
P_239 Preloaded Piezoelectric Actuators are ultrahigh-resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with submillisecond response. The internal spring preload makes them also ideal for push/pull applications such as precision tools servos and machining applications.
The standard piezo translator models are designed for open-loop operation. For optimum repeatability and precision, select the P_177.10 high-accuracy closed-loop upgrade integrating ultrahigh-resolution strain gage displacement sensors for operation with PI piezo servo controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages , for details).
P_239 models are equipped with thinner piezoelectric ceramic layers, providing displacement up to 180 µm at -1000 V operating voltage.
The PZT ceramic stack is protected by an internally spring-Pre-Loaded stainless steel case. The standard Piezoelectric Transducer / Actuator tip and base have tapped holes. Select the P_239.95 ball-tiP_option to help decouple off-axis or torque loads from the Piezoelectric Transducer / Actuator tip. For push/pull forces up to 5 N, the piezo Piezoelectric Transducer / Actuator can be mounted by clamping around the case. For larger forces, the Piezoelectric Transducer / Actuator must be mounted by the base.
Applications: Dynamic and static precision positioning, optics, metrology, smart structures, precision machining, tool servo, adaptive mechanics, vibration cancellation, switching, laser tuning, force generation for bending or compressing of material, etc. ().
Options & Upgrades: 1)
P_177.10 High-Precision Closed-Loop Upgrade, (Strain Gauge Displacment Sensor) 44), not for P_239.00 / .10
P_702.10 High Temperature Upgrade (see page 45)
P_702.20 Low-Temperature Upgrade (see page 45)
P_703.20 High Vacuum Option (see page 45)
P_705.00 Option: Positive Piezo Polarity Option (see page 45)
P_239.95 Ball Tip (see page 45)
Accessories:
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_239
Piezoelectric Transducer Model *
P_239.00 P_239.10 P_239.20 P_239.30 P_239.40 P_239.60 P_239.80 P_239.90 Units Notes see p. 47
Open-loop displacement@ 0 to -1000 V 5 10 20 40 60 100 140 180 µm ± 20 % A4
Closed-loop displacement? * 5 10 20 40 60 100 140 180 µm A5
* Integrated high-resolution position sensor SGS B
* Closed / open loop ** resolution 0.1 / 0.05 0.2 / 0.1 0.4 / 0.2 0.8 / 0.4 1.2 / 0.6 2 / 1 2.8 / 1.4 3.6 / 1.8 nm C4
Stiffness 1440 800 423 220 150 90 66 52 N/µm ± 20 % D1
Blocking force generation 7000 N ± 20 % D2
Pushing / Tensile force capacity 4500 / 500 N D3
Max. torque at tip 1000 mNm D6
Maximum drive voltage -1000 V A7
Electrical capacitance 70 120 245 460 660 1150 1550 2100 nF ± 20 % F1
Dynamic operating current coefficient (DOCC) 17.5 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 12 10 8 6.5 5.6 4 3 2 kHz ± 20 % G2
Operating temperature -40 to +80 ?C H2
Voltage connector VH J1
* Sensor connector - - L L L L L L J2
Weight without cables 85 94 112 148 184 256 328 400 g ± 5 % K
Material case / end pieces N-S L
Length L 35.5 40 48.5 66.5 83 118.5 151 184 mm ± 0.5
Recommended Piezo Linear Amplifier / Controller B, J M
* Closed-loop piezo actuator models require the P_177.10 strain gauge position sensor option and are supplied with calibration data sheets
** Noise with E507 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available!
P_242, P_246 Pre-Loaded Closed-Loop / Open-Loop High Load High Voltage PZT Piezoelectric Transducer / Actuator
o Stroke to 120 microns
o Push Forces to 12500 N
o Pull Forces to 2000 N
o Submillisecond Responsivness
o Sub-nm Precision
o Optional UHV, Low & High Temperature, Water Protected
P_242 and P_246 Preloaded High Load Piezoelectric Actuators are ultra-precision linear actuator pushers for static and dynamic applications. They provide subnanometer resolution with submillisecond response. The high load capacity and internal spring preload makes them ideal for machining applications and vibration cancellation.
The standard piezo translator models are designed for open-loop operation. For optimum repeatability and precision, select the P_177.10 high-accuracy closed-loop upgrade integrating ultrahigh-resolution strain gage displacement sensors for operation with PI piezo servo controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages , for details).
P_246 models are constructed of a larger number of thinner Piezoelectric ceramic layers than P_242 models, providing more displacement in the same package. On the other hand, their maximum operating voltage is limited to -1000 V with voltages in excess of -750 V recommended only for short periods of time.
The Models P_246.xx, P_242.30 and P_242.40 come with a stainless steel case with internal spring preload protecting the Piezoelectric ceramic stack. Models P_242.10 and P_242.20 are equipped with an aluminum case, stainless steel end pieces and spring bolts providing the preload.
Applications: Precision machining, adaptive mechanics, vibration cancellation, smart structures, Dynamic and static precision positioning of heavy parts, force generation for bending or compressing of material, etc. ().
Options & Upgrades: 1)
P_177.10 High-Precision Closed-Loop Upgrade, (Strain Gauge Displacment Sensor) 44)
P_702.10 High Temperature Upgrade (see page 45)
P_702.20 Low-Temperature Upgrade (see page 45)
P_703.20 High Vacuum Option (see page 45)
P_705.00 Option: Positive Piezo Polarity (see page 45)
P_706.xx Water Protected Case (not for P_242.10 and .20, see page 45)
Accessories:
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_242, P_246
Piezoelectric Transducer Model * P_242.10 P_242.20 P_242.30 P_242.40 P_246.20 P_246.30 P_246.50 P_246.70 Units Notes see p. 47
Open-loop displacement@ 0 to -1000 V 10 20 40 60 20 40 80 120 µm ± 20 % A4
Closed-loop displacement? * 10 20 40 60 20 40 80 120 µm A5
* Integrated high-resolution position sensor SGS B
* Closed / open loop ** resolution 0.2 / 0.1 0.4 / 0.2 0.8 / 0.4 1.2 / 0.6 0.4 / 0.2 0.8 / 0.4 1.6 / 0.8 2.4 / 1.2 nm C4
Stiffness 110 600 320 215 1050 560 295 200 N/µm ± 20 % D1
Blocking force generation 11000 11000 11000 11000 20000 20000 20000 20000 N ± 20 % D2
Pushing / Tensile force capacity 12500 / 2000 N D3
Max. torque at tip 1000 mNm D6
Maximum drive voltage -1500 -1500 -1500 -1500 -1000 -1000 -1000 -1000 V A7
Electrical capacitance 180 360 666 900 613 1150 2200 3280 nF ± 20 % F1
Dynamic operating current coefficient (DOCC) 22 22 22 22 38 38 38 38 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 11 8 4.5 3.5 8 6.5 4 3 kHz ± 20 % G2
Operating temperature -40 to +80 ?C H2
Voltage connector VH J1
* Sensor connector L J2
Weight without cables 280 360 720 830 540 600 720 830 g ± 5 % K
Material case / end pieces AL / N-S Al / N-S N-S N-S N-S N-S N-S N-S L1
Length L 41 62 114 141,5 53.5 70.5 114 141.5 mm ± 0.5 L2
Case type A A B B B B B B L3
Recommended Piezo Linear Amplifier / Controller B, J M
* Closed-loop piezo actuator models require the P_177.10 strain gauge position sensor option and are supplied with calibration data sheets
** Noise with E507 piezo linear amplifier
For piezoelectric actuator mounting guidelines see page 39
Customer specific piezo designs available!
P_243, P_247 Pre-Loaded Closed-Loop / Open-Loop EHL High Voltage PZT Piezoelectric Transducer / Actuator
o Stroke to 120 microns
o Push Forces to 30000 N
o Pull Forces to 3500 N
o Extremely High Stiffness
o Optional UHV, Low & High Temperature, Water Protected
The P_243 and P_247 Piezoelectric Actuator family provides high load capacity and high resolution for static and dynamic applications. These PZT Transducers / Actuators provide subnanometer resolution with submillisecond response. The high load capacity and internal spring preload makes them ideal for machining applications and vibration cancellation.
The standard piezo translator models are designed for open-loop operation. For optimum repeatability and precision, select the P_177.10 high-accuracy closed-loop upgrade integrating ultrahigh-resolution strain gage displacement sensors for operation with PI piezo servo controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages , for details).
P_247 models are constructed of a larger number of thinner Piezoelectric ceramic layers, providing up to twice the displacement of the P_243 models in the same package. On the other hand, their maximum operating voltage is limited to -1000 V with voltages in excess of -750 V recommended only for short periods of time.
Models P_247.xx, P_243.30 and P_243.40 come with a stainless steel case with internal spring preload protecting the Piezoelectric ceramic stack. Models P_243.10 and P_243.20 come with an aluminum case, stainless steel end pieces and spring bolts providing the preload.
Applications: Precision machining, adaptive mechanics, vibration cancellation, smart structures, Dynamic and static precision positioning of heavy parts, force generation for bending or compressing of material, etc. ().
Options & Upgrades: 1)
P_177.10 High-Precision Closed-Loop Upgrade, (Strain Gauge Displacment Sensor) 44)
P_702.10 High Temperature Upgrade (see page 45)
P_702.20 Low-Temperature Upgrade (see page 45)
P_703.20 High Vacuum Option (see page 45)
P_705.00 Option: Positive Piezo Polarity (see page 45)
P_706.xx Water Protected Case (not for P_243.10 and .20, see page 45)
Accessories:
Piezo High-Voltage cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_243, P_247
Piezoelectric Transducer Model * P_243.10 P_243.20 P_243.30 P_243.40 P_247.20 P_247.30 P_247.50 P_247.70 Units Notes see p. 47
Open-loop displacement@ 0 to -1000 V 10 20 40 60 20 40 80 120 µm ± 20 % A4
Closed-loop displacement? * 10 20 40 60 20 40 80 120 µm A5
* Integrated high-resolution position sensor SGS B
* Closed / open loop ** resolution 0.2 / 0.1 0.4 / 0.2 0.8 / 0.4 1.2 / 0.6 0.4 / 0.2 0.8 / 0.4 1.6 / 0.8 2.4 / 1.2 nm C4
Stiffness 2130 1160 625 420 2100 1120 590 400 N/µm ± 20 % D1
Blocking force generation 21000 21000 21000 21000 42000 42000 42000 42000 N ± 20 % D2
Pushing / Tensile force capacity 30 / 2 30 / 2 30 / 2 30 / 2 30 / 3.5 30 / 3.5 30 / 3.5 30 / 3.5 kN D3
Max. torque at tip 2000 mNm D6
Maximum drive voltage -1500 -1500 -1500 -1500 -1000 -1000 -1000 -1000 V A7
Electrical capacitance 360 720 1330 1800 1220 2300 4400 6560 nF ± 20 % F1
Dynamic operating current coefficient (DOCC) 45 45 45 45 76 76 76 76 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 11 8 5 3.5 8 6.5 4.5 3 kHz ± 20 % G2
Operating temperature -40 to +80 ?C H2
Voltage connection VH J1
* Sensor connector L J2
Weight without cables 460 630 850 960 580 660 830 960 g ± 5 % K
Material case / end pieces Al / N-S Al / N-S N-S N-S N-S N-S N-S N-S L1
Length L 41.5 63 116.5 144 56 73 116.5 144 mm ± 0.5 L2
Case type A A B B B B B B L3
Recommended Piezo Linear Amplifier / Controller B, J M
* Closed-loop piezo actuator models require the P_177.10 strain gauge position sensor option and are supplied with calibration data sheets
** Noise with E507 piezo linear amplifier
See the "Piezo Tutorial" for mounting guidelines
Customer specific piezo designs available!
P_803 OEM Multilayer Low Voltage PZT Bender Actuators
o Positioning range up to 1 mm
o Fast response (? 10 msec)
o Nanometer scale resolution
o Low operating voltage (0 to 60 V)
P_803 Multilayer Bender Piezoelectric actuators provide travel up to 1 mm, force up to ?0.75 N and response time in the millisecond range. The multilayer PZT Actuators are manufactured from co-fired 40 ?m ceramic layers. The benders feature two outer electrodes and one central (co-fired) electrode dividing the actuator in two segments of equal capacitance, similar to classical parallel bimorph benders (see Error! Reference source not found. in "Tutorial: Piezoelectrics & Piezoelectric Actuation for Nanopositioning" section for details).
Multilayer bender PZT Actuators offer several advantages over the classic bimorph PZTs that are manufactured by gluing two ceramic plates (0.1 to 1 mm) together: faster response time and higher stiffness. The main advantage, however, is the drastically reduced (by a factor of 3 to 10) operating voltage of only 60 V. The reduced voltage allows for smaller drive electronics and new applications such as medical equipment.
Applications: Wire bonding, fiber optic and electrical switches, beam deflection, micropositioning, acceleration sensors.
Specifications:
Models P_803.10 P_803.20 P_803.40 P_803.50 Units Notes see p. 47
Operating voltage range 0...+60 V
Deflection * ?100 ?200 ?400 ?500 µm ± 20%
Blocking force generation * ?0.60 ?0.45 ?0.45 ?0.75 N ± 20% D2
Electrical capacitance 2x650 2x900 2x1300 2x2500 nF ?20% F1
Operating temperature range -20..+80 ?C H2
Weight (w/wires) 1.6 2.1 2.9 4.1 g ?10%
Dimensions 23x10.5x0.65 33x10.5x0.65 39x12.0x0.65 48x12.5x0.80 mm (L?1.0; W?0.5; T?0.25)
Wire leads: PTFE, 100 mm ? 5
Ÿ
* Displacement and force measured with bender clamped at one end, free length l = 8 mm.
Customer specific piezo designs available
P_305, P_306 OEM Tubular High Voltage PZT Stack Transducers / Actuators
o Stroke to 40 ?m
o Submillisecond Responsivness
o Sub-Nanometer Resolution
o 5 mm and 8 mm Clear Aperture for Transmitted Light Applications
P_300 series of Tubular PZT Stack Transducers / Actuators are ultra-precision linear actuator pushers for static and dynamic applications. They provide subnanometer resolution with submillisecond response.
P_300 series Transducers / Actuators are especially well suited for fine positioning of optical components and for precision mechanical applications. The axial bore is ideal for transmitted light applications and allows integration of the actuators into optical beam lines.
Applications: Optics, laser-tuning, image stabilization, confocal microscopy, fast valve control, precision mechanics, micropositioning, micro-manufacturing
The Transducers / Actuators boast displacement from 5 ?m to 40 ?m and are available with two standard diameters:
o 10 mm OD (outer diameter) and 5 mm ID (inner diameter)
o 16 mm OD (outer diameter) and 8 mm ID (inner diameter)
UHV (Ultra High Vacuum), low temperature, high temperature and closed loop versions are available on request.
For more information on PI's line of low noise Piezo Drivers and High-Voltage Linear Amplifiers, see the "Piezo Electronics" section.
Specifications: P_305, P_306
Models P_305.00 P_305.10 P_305.20 P_305.40 P_306.00 P_306.10 P_306.20 P_306.40 Units Notes see page 30
Open-loop displacement@ 0 to -1000 V 5 10 20 40 5 10 20 40 µm ± 20 % A4
* Open loop resolution 0.05 0.1 0.2 0.4 0.05 .01 0.2 0.4 nm C2
Stiffness 160 100 60 30 320 200 120 60 N/µm ± 20 % D1
Force generation (blocked force) 800 1000 1200 1200 1600 2000 2400 2400 N ± 20 % D2
Pushing / Tensile force capacity 500 / - 500 / - 500 / - 500 / - 800 / - 800 / - 800 / - 800 / - N D3
Maximum drive voltage -1000 V A7
Electrical capacitance 25 40 65 120 55 90 180 350 nF ± 20 % F1
Dynamic operating current coefficient (DOCC) 6.25 6.25 6.25 6.25 14 14 14 14 µA/(Hz x µm) F2
Resonant frequency @ no load (f0) 20 14 12 8 10 8.5 7 5.5 kHz ± 20 % G2
Operating temperature -20..+80 ?C H2
Wire leads PTFE, 100 mm ?5 mm, ? 1.3
Weight 4.3 6.3 10.3 20.5 9.5 17 24.2 46 g ± 5 % K
Length 8 12 21 40 8 12 21 40 mm ± 1
Recommended Amplifier B, I M
** Noise with E507 piezo linear amplifier
Customer specific piezo designs available
PT120 High Voltage PZT Tube Actuators
o Scanning Microscopy
o Ultrasonic Applications
o Piezoelectric Pumps
o Ink Jet Printers
o NanoPositioning
PZT tubes are monolithic actuators which contract laterally and longitudinally when a voltage is applied between the inner and outer electrodes. With quadrature electrodes the tubes can be operated as XY scanners.
Specifications:
Electrodes: Silver coated inside and out
Polarization: Inner electrode positive
Max. operating voltage Umax.: 500 or 1000 V
The following standard models are examples of our capabilities. For more details, ask for separate data sheet.
Models L OD ID Max. operating voltage. Capacitance Contraction at max. operating voltage.
[mm] [mm] [mm] [V] [nF ] ± 20% ?L [µm] ? OD [µm]
PT 120.00 20 ± 0.2 2.2 ± 0.1 1.0 ± 0.1 500 3 4 --
PT 130.00 30 ± 0.2 3.2 ± 0.1 2.2 ± 0.1 500 10 8 0.5
PT 130.10 30 ± 0.2 6.35 ± 0.05 5.15 ± 0.05 500 18 6 1
PT 130.20 30 ± 0.2 10.0 ± 0.05 9.0 ± 0.05 500 35 8 2.5
PT 130.30 30 ± 0.2 10.0 ± 0.05 8.0 ± 0.05 1000 16 8 2
PZ 130.40 30 ± 0.2 20.0 ± 0.05 18.0 ± 0.05 1000 35 8 5
Custom dimensions, electrodes and materials are available for volume buyers.
Customized Solutions for OEM PZT Ceramic Applications
PI Ceramic - PI's ISO 9001 certified subsidiary - fully integrates research, development and manufacturing of
o piezoelectric and dielectric ceramics
o multilayer actuators
o piezo rings, tubes, discs and plates
o ultrasonic transducers
o piezo motors
State-of-the-Art Fabrication Equipment
o molding
o film casting
o ceramic grinding and polishing
o vacuum coating
Piezoceramic Materials
A wide selection of high quality Lead Zirconate Titanate (PZT) materials are offered to suit many applications. Discs, Plates, Tubes, Rings and Shear Plates in a variety of standard and custom form factors are available from the following materials (please ask for special data sheets):
PIC 131
PIC 131 piezoceramic material offers a high electro-mechanical coupling factor (k15) in shear mode, high mechanical Q and minimum change of piezoelectric characteristics over time and temperature changes.
Applications: Ultrasonic transducers for delay line components and shear plates.
PIC 140
PIC 140 piezoceramic material offers high mechanical stability and polarization resistance in combination with a high mechanical Q and high Curie Point. Applications are in the field of power ultrasonics, sound navigation and ranging or medical diagnostics.
PIC 141
PIC 141 piezoceramic material offers high electromechanical coupling factors with reasonable mechanical Q, good mechanical stability, and resistance to high electrical fields.
PIC 151
PIC 151 piezoceramic material offers the highest piezoelectric coupling factor and very high dielectric and piezoelectric constants. It is especially suited for micropositioning components, low-frequency ultrasonic transducers, buzzers and ultrasonic speakers.
PIC 155
PIC 155 piezoceramic material offers a high piezoelectric coupling factor, low mechanical Q and minimal response of the dielectric constants to temperature changes. The material is especially suited for low-frequency ultrasonic transducers in pulse mode and for transmission and reception over a wide temperature range.
PIC 163
PIC 163 piezoceramic material offers good temperature and time constant stability and great elastic anisotropy. The main fields of application are resonators and filters with high frequency stability and filters with energy trapping.
PZT Characteristics PIC 131 PIC 140 PIC 141 PIC 151 PIC 155 PIC 163 PIC 255
Density [g/cm³] 7.85 7.60 7.80 7.80 7.70 7.75 7.8
Curie Temperature [°C] 265 330 275 250 345 240 350
Dielectric Constant ?T33 / ??
600 1200 1300 2100 1500 1200 1750
Dielectric Constant ?T11 / ??
1300 680 1500 1980 1500
Dielectric Loss (tan ? [x 10-3]) 10 10 5 15 20 10 15
Resistivity [? m] 1012 1010 1010 1011 1011 1011
Coupling Factors
kP 0.52 0.50 0.58 0.62 0.62 0.55 0.62
k33 0.63 0.60 0.66 0.69 0.69 0.35
k31 0.29 0.25 0.31 0.34 0.35 0.69
Mechanical Q 1500 350 1250 120 80 1200 80
Frequency Constants [Hzm]
NP 2100 2200 2200 2100 19500 1700 2000
N1 1700 1680 1610 1500 1430 1420
N3 1900 1800 1925 1680
Nt 2000 2100 2050 1950 1985 2000
Charge Constants [x 10-12 m/V]
d31 - 70 - 60 - 140 - 210 - 165 - 113 -180
d33 200 200 310 450 360 260 400
d15 440 265 475 580 450 425
Voltage Constants [x 10-3 Vm/ N]
g31 - 13.2 - 8.5 - 13.1 - 11.5 -12.4 -11.3
g33 37.7 28.2 29.0 22.8 27.0 25.1
Elastic Constant
[x 10-12 m²/N]
S11E 10.8 11.7 12.6 15.0 13.2 16.1
S33E 10.0 11.7 13.0 19.0 18.7 20.7
Aging Rate [% per Time Decade]
Cf + 0.02 + 0.03 + 0.03
Ck - 0.02 - 0.01 - 0.01
OEM PZT Transducers / Actuators
o Custom Dimensions
o Custom Ceramics
o Custom Coatings
o Custom End-Pieces
o Custom Casings
With our in-house ceramics manufacturing capabilities at PI Ceramic we are in a position to offer custom PZT stack Transducers / Actuators, benders, shear actuators and tubes for almost any OEM application. If the right solution is not in this catalog, contact your local PI representative.
Options and Accessories
Options & Upgrades
The following options must be installed in the piezo Transducers / Actuators during the manufacturing process. They must be ordered with the PZT actuator and cannot be added later. If necessary contact your local PI office for details on how to order modified Transducers / Actuators.
P_177.10 Strain Gage Position Sensor for High Voltage Piezo Stack Actuators
For positioning requiring high repeatability and accuracy the P_177.10 strain gage position sensor is available. (See pages and for more information on position sensors and closed loop operation of PZT Actuators). PZTs with strain gage sensors are equipped with an 1 m PUR cable with LEMO FFA.0S.304.CLAC32 connector in addition to the voltage cable.
The P_177.10 strain gauge position sensor option includes factory calibration of any PI servo controller (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section) delivered with the sensor equipped PZT Piezoelectric Transducer / Actuator.
Extended Temperature Range
Standard 1000 V PZT Acutators work in the temperature range from -40 °C to 80 °C (-40 °F to +176 °F). For some applications this range is insufficient.
The following Options are available:
P_702.10 (only for High Voltage PZT Actuators)
High temperature range
-40 °C to +150 °C / -40 °F to +302 °F / 233 K to 423 K
Special insulation materials are used. The electrical connection is via two 50 cm Teflon leads without connectors.
P_702.20 (only for High Voltage PZT Actuator Types)
Low temperature range
-273 °C to +80 °C/ -452 °F to +176 °F / 0 K to 353 K
Generally all PZT ceramics function down to zero degrees Kelvin. However, piezo Transducers / Actuators are constructed of a combination of materials (ceramics, metal, insulating materials...) which makes the situation more complex.
To qualify the Piezoelectric Actuators for cryogenic temperatures, special insulation material and cement must be used. The low temperature Transducers / Actuators are delivered as bare ceramic stacks without case and mechanical preload. The electrical connection is via two 50 cm Teflon leads without connector.
See "Tutorial: Piezoelectrics & Piezoelectric Actuation for Nanopositioning" section, page for performance at low temperature.
Vacuum Options
All PI piezo Transducers / Actuators can be safely used in a vacuum outside the range from 10 to 0.01 Torr (see Error! Reference source not found. in "Tutorial: Piezoelectrics & Piezoelectric Actuation for Nanopositioning" section, page , for discussion). For applications that require reduced outgassing, the P_703.10 and P_703.20 high vacuum options are available.
P_703.10 UHV (for non preloaded PZT Actuator Types)
The Transducers / Actuators are delivered as bare ceramic stacks without a case. The PZTs can be baked up to 150 °C. The electrical connection is via two 50 cm long Teflon leads without connector. The nominal displacement of the PZT actuator is reduced by about 20 % (due to the stiff insulation materials). P_703.10 includes P_702.10 if ordered with High Voltage PZTs.
P_703.20 UHV (for preloaded PZT Actuator Types)
The piezo ceramics are enclosed in a stainless steel case with vent holes. The PZTs can be baked to 150 °C. The electrical connection is via two 50 cm Teflon leads without connector. The nominal displacement of the PZT actuator is reduced by about 20 % (due to the stiff insulation materials). P_703.20 includes P_702.10 if ordered with High Voltage PZTs.
P_705.00 Positive polarity (for High Voltage PZT Actuator Types)
All PI standard High Voltage PZT Transducers / Actuators are negative polarity devices. The operating voltage is negative; the case is positive/GND. With the P_705.00 option 1000 V PZTs can be operated with positive polarity.
Case (GND) is negative (black lead).
Operating voltage is positive (red lead).
P_706.xx Water Protected Case
The water protected case is recommended if PZT Actuators are used in applications where high humidity or spray of coolants, oil, water, etc. might jeopardize the piezo ceramics. It consists of a specially sealed steel case with integrated flexure zones. Please call for dimensions and further details.
The following Transducers / Actuators are available with
water protected case:
P_844.xx, P_845.xx, P_242.30/40, P_243.30/40, P_246.xx, P_247.xx.
Ball tips
To avoid bending moments and shear forces on the PZT actuator ceramics, the Transducers / Actuators are available with a ball tip instead of the standard top piece. Dimensions are given in the drawings for the individual Transducers / Actuators. Note that due to the point contact of the ball tip, the stiffness of the system is reduced.
Accessories
Accessories can be installed after manufacture.
P_176.10/20/30 Magnetic Adapter
To attach P_820 and P_840/1 and P_244/5 Transducers / Actuators to various positioning units the P_176.10/20/30 magnetic adapters are available. The P_176.30 can be glued on the top piece of the P_820. The P_176.20 can be screwed into the top piece of the P_840/1. The P_176.10 can be screwed into the top piece of the P_244/5.
P_176.50/60 Flexible Tip
PZT ceramics cannot withstand bending forces. The P_176.50/60 flexible tips are available for applications where it is not possible to avoid those forces. They can be screwed into the standard top pieces of the P_842/3 and P_844/5 Transducers / Actuators.
Models Thread ? [mm] L [mm] Tilting angle
[deg] Axial Stiffness
[N/µm] Bending Stiffness
[Nm/rad]
P_176.50 M5/M5 8 20 ±0.5 100 22
P_176.60 M8/M8 12 30 ±0.5 200 40
Cables and Cable Adapters
A variety of cables, extension cables and adapters are available. See "Accessories" at the end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for further details.
Copyright PI (Physik Instrumente), 1996-1998.
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